procedure for 和 procedure of，都正确，for 表示目的，of 表示“所属”。例如：

1. Water is a necessity in every procedure of making tofu. 

做豆腐的各个环节都和水密不可分。

2. The procedure of applying for changing registration is complicated.

申请变更登记的程序很复杂。

3. He minuted the procedure of the meeting.  

他对会议议程做了记录。

来自《简明英汉词典》

4. The quantal features can be obtained by the canonical procedure of quantization.  

量子特征可用正则量子化方式得到。

来自辞典例句

5. The procedure of converting serial data into parallel data.  

将串行数据转换为并行数据的过程或方法。

来自辞典例句

6. The procedure of collecting money is illustrated as follows.  

收货款的程序图示如下。

来自辞典例句